The conference brings together engineers and scientists from all over the world to discuss recent progress and future trends in the fabrication and application of micro- and nanostructures and devices. Applications in electronics, photonics, electromechanics, environment, life sciences and biology are also discussed.

The themes are:

A. Micro- and Nanopatterning

  1. Photon lithography;
    • (DUV, EUV, immersion, sources, optics, mask technology, alignment, optical proximity correction, modelling, throughput, double exposure)
  2. Mask technology
  3. Electron and ion beam lithography;
    • (sources, optics, systems, alignment, proximity corrections, modelling, ion and electron beam – surface interactions, direct writer)
  4. Soft Lithography: Imprint, micro-contact;
    • (stamp and its fabrication, systems, processes and imprinting methods, demoulding, throughput, modelling, alignment, overlay, damage, surface functionalization)
  5. Materials for Micro and Nano Lithography;
    • (resists for optical, e-beam, ion-beam and soft-lithography, resist processing, resist structure, modelling)
  6. Directed Self Assembly;
    • (modelling, self alignment, block copolymers)
  7. Tip-based / scanning probe based patterning techniques;
    1. (mechanical modifications, thermal interactions, optical near-field, Fluid-FM, nano-manipulation)
  8. Stencil based patterning
  9. Novel techniques;
    • (Combination top-down bottom-up)

B. Micro- and Nanofabrication

  1. Pattern transfer;
    • (lift-off with new materials, sputtering, milling)
  2. Plasma Etching;
    • (nanoscale etching, etching of new materials, deep etching, directional (lateral) etching)
  3. E- and ion-beam induced deposition;
    • (deposition, etching, modelling)
  4. 3D nano manufacturing;
    • (integration of nano-objects, scale up and transfer to manufacturing)
  5. 3D microprinting;
    • (printing/deposition of nano-particles, -tubes, rods, rapid prototyping
  6. Inspection and process diagnostics and control;
    • ((in-line) testing, (nano-) metrology, X-ray analyses, Sample preparation for inspection, In-situ process measurements)
  7. (Nano-) metrology;
    • (dimensions, mechanical properties, electronic properties)
  8. Self aligned process;
    • (alignment, overlay, modelling);

C. Micro/Nano devices and systems

  1. MEMS / NEMS;
    • (RF-MEMS, MOEMS, surface micromachining, bulk micromachining, timekeeping devices, energy harvesters)
  2. Micro and nano fluidic systems;
    • (fluidic elements and their fabrication/integration)
  3. Meta-materials and their fabrication
  4. System design
  5. Micro/Nano devices for physical science;
    • (nanoelectronics, single electron transistor devices, quantum computer, plasmonic devices)
  6. Data storage;
    • (magnetic devices, optical storage)
  7. Packaging technology;
    • (materials, testing, reliability, modelling)
  8. Reliability
  9. Applications

D. Micro- and Nanotechnology/engineering for Life sciences and Biology

  1. Sensing;
    • ((bio-) chemical sensing, materials, transduction, in-vivo sensing)
  2. Lab-on-Chip;
    • (integration, fabrication, application, µ-TAS, proteomics, cell-omics)
  3. Organ-on-a-Chip;
    • (interfaces, culturing, sensing/observation, application)
  4. Micro nano fluidics for bio/life sciences;
    • (fluidic elements, contamination, clogging)
  5. System design and fabrication
  6. Applications;
    • (point of care devices for developing countries, Lab-on-chip for developing world)

As in previous years, all presenters will be kindly asked to publish their contribution in the four special issues to appear after peer-reviewing in the Journal of Microelectronic Engineering.